The Board of Trustees of the Leland Stanford Junior University
发明人:
Yao-Te CHENG,Ludwig GALAMBOS,Lambertus HESSELINK
申请号:
US16738807
公开号:
US20200222017A1
申请日:
2020.01.09
申请国别(地区):
US
年份:
2020
代理人:
摘要:
An X-ray grating configured for use in an X-ray imaging apparatus is provided. The X-ray grating has a silicone-based base layer. A plurality of silicon-based ridges is on a surface of the silicon-based base layer, wherein the plurality of silicon-based ridges from a plurality of trenches, where a trench of the plurality of trenches is between two silicon-based ridges of the plurality of silicon-based ridges. A plurality of silicon-based bridges extends between adjacent silicon-based ridges, wherein each silicon-based ridge of the plurality of silicon-based ridges is connected to at least one adjacent silicon-based ridge of the plurality of silicon-based ridges by at least one of a silicon-based bridge of the plurality of silicon-based bridges and wherein at least one of a plurality of four adjacent trenches does not have any silicon-based bridges.