MIROIR DÉFORMABLE, SYSTÈME OPTIQUE COMPRENANT LE MIROIR DÉFORMABLE ET APPAREIL OPHTALMOLOGIQUE

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专利权人:

Canon Kabushiki Kaisha

发明人:

申请号：

EP15198061.2

公开号：

EP3028626A1

申请日:

2015.12.04

申请国别(地区):

EP

年份:

2016

代理人:

摘要：

A mount substrate (third substrate) (300) is disposed so as to face a mirror substrate (second substrate) (200) having a larger projection area, and the mirror substrate (200) is bonded to the mount substrate (300) in a region in which an actuator substrate (100) and the mirror substrate (200) do not overlap each other in an in-plane direction (XY direction) parallel to an in-plane direction of a reflective member (202).

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/