PROBLEM TO BE SOLVED: To provide a surface treatment device using an excimer lamp that can improve a balance between an exposure amount of ultraviolet light to an object to be treated and a contact amount of ozone.SOLUTION: The present invention includes: a case 15 an excimer lamp 20 provided in the case for generating ultraviolet light support means 23 for supporting an object 30 to be treated to which a surface treatment is implemented using the ultraviolet light and the ozone generated in the case resulted from the ultraviolet light a suction port 18a for communicating a space formed in the case and a space outside the case and evacuation means 25 for evacuating air in the case to outside. The suction port, the object to be treated supported to the support means, the excimer lamp, and the evaluation means are configured to be positioned on the same horizontal plane P, and the suction port, the support means, the excimer lamp, and the evacuation means are positioned on a linear line L in this order in a plane view.SELECTED DRAWING: Figure 2COPYRIGHT: (C)2016,JPO&INPIT【課題】被処理体に対する紫外線の照射量とオゾンの接触量のバランスを良好にすることが可能なエキシマランプを利用した表面処理装置を提供する。【解決手段】ケース15と、ケース内に配設した紫外線を発生させるエキシマランプ20と、紫外線及び紫外線に起因してケース内で発生したオゾンを利用した表面処理が行われる被処理体30を支持する支持手段23と、ケースに形成したケース内の空間とケース外の空間を連通させる吸引口18aと、ケース内の気体をケース外へ排気するための排気手段25と、を備え、吸引口、支持手段に支持した被処理体、エキシマランプ、及び排気手段が同一水平面P上に位置する態様で、吸引口、支持手段、エキシマランプ、及び排気手段を吸引口、支持手段、エキシマランプ、排気手段の順序で平面視において一本の直線L上に並べた。【選択図】図2
