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SPECTROSCOPE, DISPOSITIF D'INSPECTION OPTIQUE, ET DISPOSITIF DE TOMOGRAPHIE PAR COHÉRENCE OPTIQUE (OCT)
专利权人:
Horiba; Ltd.
发明人:
申请号:
EP16875638.5
公开号:
EP3392646A1
申请日:
2016.12.13
申请国别(地区):
EP
年份:
2018
代理人:
摘要:
This invention is to provide a spectroscope that can improve resolution and reduce loss of light intensity and/or distortion of a wave front while enabling detection of the optical spectrum for each of a plurality of polarization components in incident light. The spectroscope is a spectroscope that comprises a first diffraction grating 51 to which at least a transmitted light or a reflected light from an object to be measured enters, which diffracts a first polarization component of the incident light and which transmits a second polarization component that is different from the first polarization component of the incident light without diffraction, and a first light-receiving element 55 that receives a spectrum of the light diffracted by the first diffraction grating 51.
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