PROBLEM TO BE SOLVED: To provide a surface treatment apparatus in which surface modification, surface sterilization, and water treatment are performed by a low voltage and a low cost using an exciting active species generated by plasma.SOLUTION: A surface treatment apparatus includes: an atmospheric pressure plasma generation part 15 a mist discharge part 9 in which a fluid is generated as mist a process gas supply part 8 in which atmospheric plasma and the mist are sent to a surface of a product to be processed 7. The surface of the product to be processed is irradiated with the atmospheric plasma including the mist that has passed a plasma space 4.COPYRIGHT: (C)2014,JPO&INPIT【課題】低電圧で、かつ低コストで、プラズマによって発生する励起活性種を用いて、表面改質や表面殺菌、水処理を行う表面処理装置を提供する。【解決手段】大気圧プラズマ生成部15と、液体をミストとして発生させるためのミスト放出部9と、大気圧プラズマ及び前記ミストを被処理物7の表面に送出するためのプロセスガス供給部8と、を備え、プラズマ空間4を通過したミストを含んだ大気圧プラズマによって被処理物の表面を照射するようにした。【選択図】図2
