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光画像計測装置及びその制御方法
专利权人:
株式会社トプコン
发明人:
林 健史
申请号:
JP2009000529
公开号:
JP5364385B2
申请日:
2009.01.06
申请国别(地区):
JP
年份:
2013
代理人:
摘要:
A low-coherence light is split into a signal light and a reference light. The optical path length of the reference light is switched to optical path lengths that correspond to a first depth zone and a second depth zone. When forming a tomographic image of the second depth zone, in an optical system that condenses the signal light to the first depth zone when a measured object and an objective lens are located at a predetermined working distance, while being positioned at the working distance, a depth zone switching lens that transitions the depth at which the signal light is condensed to the second depth zone is inserted.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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