PROBLEM TO BE SOLVED: To provide a gas-mixing device with which the mixing ratio of gases can be changed in a short response time with high accuracy.SOLUTION: The gas-mixing device 10 includes: a plurality of confluent valves 23 which are disposed in parallel to one another, to each of which oxygen and air are supplied and through which the oxygen and the air pass a plurality of micropumps 24, each of which is disposed downstream of the confluent valve 23 one by one and sends out the mixture gas of the oxygen and the air passing through the confluent valves 23 and a confluent part 25 where the gases sent out from each of the micropumps 24 are confluent downstream of the micropumps 24.COPYRIGHT: (C)2013,JPO&INPIT【課題】気体の混合比率の変更を、応答時間を短く、且つ精度良く行えるようにする。【解決手段】気体混合装置10は、互いに並列に配置され、各々が酸素と空気の供給を受けて当該酸素と空気を通過させる複数の合流弁23と、これら複数の合流弁23の各々の下流に一つずつ配置され、合流弁23を通過した酸素と空気の混合気体を送り出す複数のマイクロポンプ24と、これら複数のマイクロポンプ24の下流において、当該複数のマイクロポンプ24の各々から送り出された気体を合流させる合流部25と、を備える。【選択図】図1
