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圧力センサ、音響マイク、血圧センサ及びタッチパネル
专利权人:
株式会社東芝
发明人:
藤 慶彦,福澤 英明,原 通子,東 祥弘,堀 昭男,永田 友彦,加治 志織,湯澤 亜希子
申请号:
JP2016185408
公开号:
JP6200565B2
申请日:
2016.09.23
申请国别(地区):
JP
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a pressure sensor having high sensitivity, and an acoustic microphone, a blood pressure sensor and a touch panel.SOLUTION: According to an embodiment, the pressure sensor is provided that includes: a substrate a first electrode a second electrode a first magnetic layer a second magnetic layer a spacer layer and a third magnetic layer. The substrate includes a first region and a second region. The first electrode is provided in the first region. The second electrode is provided on the first electrode. The first magnetic layer is provided between the first electrode and the second electrode. The second magnetic layer is provided at one of a position between the first electrode and the first magnetic layer and a position between the first magnetic layer and the second electrode. A magnetization direction of the second magnetic layer is variable. The spacer layer is provided between the first magnetic layer and the second magnetic layer in a lamination direction directed from the first electrode to the second electrode. The third magnetic layer is provided continuously from the second magnetic layer on the second region. Magnetization of the third magnetic layer varies according to distortion generated in the second region.SELECTED DRAWING: Figure 2
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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