PROBLEM TO BE SOLVED: To provide a chemical liquid charging device which allows a user to easily discriminate completion of charging a chemical liquid into a chemical liquid storage part even when the color of the chemical liquid is difficult to see.SOLUTION: A chemical liquid charging device 1 comprises a suction mechanism 13, a pressure detector 101, a notification part 103, and a controller 102. The suction mechanism 13 sucks a gas inside a chemical liquid storage part 62 via a suction side connection port 55. The pressure detector 101 detects a pressure of the suction mechanism 13. The notification part 103 gives notification that a chemical liquid is charged into the chemical liquid storage part 62. The controller 102 causes the notification part 103 to operate on the basis of the pressure of the suction mechanism 13 detected by the pressure detector 101.SELECTED DRAWING: Figure 5COPYRIGHT: (C)2016,JPO&INPIT【課題】薬液の色が見え難い場合でも、薬液貯蔵部への薬液の充填完了を容易に判別することができる薬液充填装置を提供する。【解決手段】薬液充填装置1は、吸引機構13と、圧力検知部101と、報知部103と、制御部102と、を備えている。吸引機構13は、吸引側接続ポート55を介して薬液貯蔵部62の内部の気体を吸引する。圧力検知部101は、吸引機構13の圧力を検知する。報知部103は、薬液貯蔵部62に薬液が充填されたことを報知する。制御部102は、圧力検知部101が検知した吸引機構13の圧力に基づいて報知部103を動作させる。【選択図】図5
