PROBLEM TO BE SOLVED: To enable weighting on a scan line about an important part to be an inspection target of an object to be inspected.SOLUTION: An imaging device controls scanning means so as to overlap portions of adjacent scanning areas on each other among a plurality of scanning areas of measuring beams in an object to be inspected at a prescribed part, and acquires a tomographic image of the object to be inspected on the basis of a plurality of beams obtained by multiplexing a plurality of return beams from the object to be inspected irradiated with the plurality of measuring beams with a plurality of reference beams corresponding to the plurality of measuring beams.COPYRIGHT: (C)2014,JPO&INPIT【課題】 被検査物の検査対象となる重要部分について、走査線上の重み付けを可能にすること。【解決手段】 撮像装置は、被検査物における複数の測定光の走査領域のうち隣り合う走査領域の一部同士を被検査物の所定の部位で重複させるように、走査手段を制御し、複数の測定光を照射した被検査物からの複数の戻り光と複数の測定光に対応する複数の参照光とを合波した複数の光に基づいて、被検査物の断層画像を取得する。【選択図】 図9
