PROBLEM TO BE SOLVED: To provide a heating device improving the heating quality of an object to be heated in the heating device using dummy liquid, and improving the yield of heat treatment.SOLUTION: A heating device 10 includes a passage switching valve 18 switched between the condition that inflow pipe 17 and product supply pipe 15 communicate with each other and the communication of dummy liquid supply pipe 16 and the inflow pipe 17 is disconnected, and the condition that the communication of the inflow pipe 17 and the product supply pipe 15 is disconnected and the inflow pipe 17 and the dummy liquid supply pipe 16 communicate with each other. When a pump 19 dispenses dummy liquid D toward a heating unit 11a, the number of revolutions of the pump 19 is more decreased than when dispensing an object W to be heated.COPYRIGHT: (C)2013,JPO&INPIT【課題】ダミー液を使用するようにした加熱装置における被加熱物の加熱品質を向上し、加熱処理の歩留まりを向上する。【解決手段】加熱装置10は、流入配管17と製品供給配管15とを連通させるとともにダミー液供給配管16と流入配管17との連通を遮断させる状態と、流入配管17と製品供給配管15との連通を遮断させるとともに流入配管17とダミー液供給配管16とを連通させる状態とに切り換える流路切換弁18を有しており、ポンプ19がダミー液Dを加熱ユニット11aに向けて吐出するときには被加熱物Wを吐出するときよりもポンプ19の回転数を低下させる。【選択図】図4
