PROBLEM TO BE SOLVED: To solve the problem in which it is difficult to narrow a diameter of a tip part of a scanning probe, in conventional component arrangement.SOLUTION: A scanning probe comprises: an optical fiber a movable cylindrical part storing and holding the optical fiber a storage cylindrical part storing the movable cylindrical part a shape-memory alloy disposed between the base end face of the movable cylindrical part and the inner wall face of the storage cylindrical part, and sliding the movable cylindrical part in an axial direction together with the optical fiber inside the storage cylindrical part by expanding and contracting in the axial direction by current carrying and an energizing spring disposed between the outer circumferential face of the movable cylindrical part and the inner circumferential face of the storage cylindrical part, and energizing the movable cylindrical part in the axial direction that is a direction opposite to the shape-memory alloy.COPYRIGHT: (C)2015,JPO&INPIT【課題】従来の部品配置では走査型プローブの先端部を細径化するのが難しい。【解決手段】走査型プローブを、光ファイバと、光ファイバを収容し保持する可動筒部と、可動筒部を収容する収容筒部と、可動筒部の基端面と収容筒部の内壁面との間に配置されており、通電によって軸線方向に伸縮することにより、収容筒部内で可動筒部を光ファイバと一体に軸線方向にスライドさせる形状記憶合金と、可動筒部の外周面と収容筒部の内周面との間に配置されており、可動筒部を軸線方向であって形状記憶合金と反対の方向に付勢する付勢ばねより構成する。【選択図】図3
