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Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device
专利权人:
发明人:
Tomoaki Nakamura,Jiro Tsuruno,Kanechika Kiyose
申请号:
US14753121
公开号:
US09592534B2
申请日:
2015.06.29
申请国别(地区):
US
年份:
2017
代理人:
摘要:
An ultrasonic transducer element chip includes a substrate, a plurality of ultrasonic transducer elements and a plate-shaped member. The substrate includes a partition wall section defining a plurality of openings arranged in an array pattern. A wall thickness of the partition wall section is smaller than a wall height of partition wall section. Each of the ultrasonic transducer elements is provided in each of the openings. The plate-shaped member is fixed on a surface of the substrate opposite to a surface of the substrate on which the ultrasonic transducer elements are provided. The plate-shaped member covers at least one of the openings in a plan view seen along a thickness direction of the substrate.
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