Problem to be solved: to provide a plasma generating apparatus capable of generating a plasma of a sufficient size by a plasma generating apparatus which can be manufactured easily and inexpensively.Solution: an electromagnetic wave input portion 30 connected to the electromagnetic wave oscillator MW is provided at one end, and the electromagnetic wave transmission line 3 extending from the input part 30 toward the other end is a rectangular shaped first substrate 2A formed on the main surface, and the discharge part 4a, the resonant part 4b, and the resonant part 4b are connected to the main surface of the first substrate A second substrate 2B having a rectangular parallelepiped shape having a resonant electrode 4 formed of a coupling portion 4C, a top plate 6A on which a first substrate 2a is disposed, a bottom plate 6B having a plurality of second substrates 2B, and discharge portions 4A are formedThe grounded grounding electrode 5, the first substrate 2a and the second substrate 2B are formed of a connecting member 7 for connecting the top plate 6a and the bottom plate 6B so that the main surfaces are opposed to each other, and a shield plate 8 erected between the second substrate 2b is disposed on the bottom plate 6B to which the second substrate 2b is disposed.Diagram【課題】容易かつ安価に製造することができるプラズマ生成装置で十分な大きさのプラズマを生成することのできるプラズマ生成装置を提供すること。【解決手段】一端に電磁波発振器MWと接続される電磁波入力部30を備え、この入力部30から他端側に向かって延設される電磁波伝送線路3が主面に形成される直方体状の第1基板2Aと、主面に放電部4a、共振部4b及び放電部4aと共振部4bを繋ぐ連結部4cからなる共振電極4を形成した直方体状の第2基板2Bと、第1基板2Aが配設される天板6Aと、第2基板2Bが複数配設される底板6Bと、放電部4aとの間で放電を生じせしめる接地電極5と、第1基板2A及び第2基板2Bを、主面同士が対向するように天板6A及び底板6Bを連結する連結部材7とからなり、第2基板2Bが配設される底板6Bには、第2基板2B間に立設するシールド板8を配設する。【選択図】図1
