KEITH G. FIFE;Jianwei Liu;Joseph Lutsky;Sarp Satir;Jungwook Yang
发明人:
KEITH G. FIFE,Jianwei Liu,Joseph Lutsky,Sarp Satir,Jungwook Yang
申请号：
US16401630
公开号：
US20190336104A1
申请日:
2019.05.02
申请国别(地区):
US
年份:
2019
代理人:
摘要：
An ultrasound device is described. The ultrasound device may include a cavity, a membrane, and a sensing electrode. When an electrical signal is applied to the sensing electrode and a static bias is applied to the membrane, the membrane vibrates within the cavity and produces ultrasonic signals. The cavity, the membrane, and the sensing electrode may be considered a capacitive micromachined ultrasonic transducer (CMUT). The sensing electrode may be shaped as a ring, whereby the central portion of the sensing electrode is removed. Removal of the central portion of the sensing electrode may reduce the parasitic capacitance without substantially affecting the production of ultrasonic signals by the CMUT. This, in turn, can result in an increase in the signal-to-noise ratio (SNR) of the ultrasonic signals. The ultrasound device may further include a bond pad configured for wire bonding, and a trench electrically isolating the bond pad from the membrane.
