METHOD FOR CLEANING A VACUUM SYSTEM USED IN THE MANUFACTURE OF OLED DEVICES, METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES, AND APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES

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专利权人:

APPLIED MATERIALS, INC.;DIEGUEZ-CAMPO, Jose Manuel;KELLER, Stefan;LEE, Jae Won;ANJIKI, Takashi;HAAS, Dieter

发明人:

DIEGUEZ-CAMPO, Jose Manuel,KELLER, Stefan,LEE, Jae Won,ANJIKI, Takashi,HAAS, Dieter

申请号：

WO2017EP60239

公开号：

WO2018197008(A1)

申请日:

2017.04.28

申请国别(地区):

世界知识产权组织国际局

年份:

2018

代理人:

摘要：

The present disclosure provides a method (100) for cleaning a vacuum system used in the manufacture of OLED devices. The method (100) includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.

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中国工程科技知识中心

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