Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
发明人:
Piras, Daniele,van Neer, Paul Louis Maria Joseph,van Es, Maarten Hubertus,Sadeghian Marnani, Hamed
申请号：
EP20170164817
公开号：
EP3385725(A1)
申请日:
2017.04.04
申请国别(地区):
欧洲专利局
年份:
2018
代理人:
摘要：
The document relates to a method of performing subsurface imaging of embedded structures underneath a substrate surface, using an atomic force microscopy system. The system comprises a probe with a probe tip, and a sensor for sensing a position of the probe tip. The method comprises the steps of: positioning the probe tip relative to the substrate; applying a first acoustic input signal to the substrate; applying a second acoustic input signal to the substrate; detecting an output signal from the substrate in response to the first and second acoustic input signal; and analyzing the output signal. The first acoustic input signal comprises a first signal component and a second signal component, the first signal component comprising a frequency below 250 megahertz and the second signal component either including a frequency below 2.5 megahertz or a frequency such as to provide a difference frequency of at most 2.5 megahertz with the first signal component, such as to enable analysis of an induced stress field in
