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多点距離測定装置及び形状測定装置
专利权人:
株式会社東京精密
发明人:
松本 弘一,石井 雅文
申请号:
JP20140121121
公开号:
JP6269334(B2)
申请日:
2014.06.12
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a multipoint distance measuring device capable of measuring distances to a plurality of points on an object to be measured with high accuracy and in a short time without depending on the shape of the object to be measured, and a shape measuring apparatus.SOLUTION: A Fabry-Perot etalon generates special light having a repetition frequency from a broad spectrum. The special light is divided into reference light and distance measuring light. The distance measuring light is divided into a plurality of light beams. The plurality of light beams are emitted toward a plurality of points of an object to be measured from a plurality of light incidence/emission parts, and the light beams regularly reflected at the plurality of points are respectively made incident to the plurality of light incidence/emission parts. Optical interference signals are detected between the reference light and the light beams for each of the plurality of points. Distances are calculated between the plurality o
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