PROBLEM TO BE SOLVED: To reduce a manufacturing cost of a filter cover.SOLUTION: An absorption unit includes a filter formed in a plate shape, and a cover having a pair of cover members which are arranged on outer circumference part of the filter and are incorporated by sandwiching the filter. Each of the pair of cover members includes an annular part for covering the filter along an outer circumference of the filter, a filter holding part which is formed on the annular part and sandwiches and holds the filter, an engagement part which is formed on an inner circumference surface of the annular part and engages with the pair of cover members, and an opening formed opposite to the engagement part on the filter holding part.SELECTED DRAWING: Figure 21COPYRIGHT: (C)2019,JPO&INPIT【課題】フィルタのカバーの製造コストを低減する。【解決手段】吸着ユニットは、板状に形成されるフィルタと、フィルタの外周部に設けられてフィルタを挟んで組み合わされる一組のカバー部材を有するカバーと、を備える。一組のカバー部材のそれぞれは、フィルタの外周に沿って前記フィルタを覆う環状部と、環状部に形成されてフィルタを挟んで保持するフィルタ保持部と、環状部の内周面に形成されて一組のカバー部材を係合する係合部と、係合部と対向してフィルタ保持部に形成された開口と、を有する。【選択図】図21
