PROBLEM TO BE SOLVED: To provide an ultrasonic device that can avoid a dimensional error of vibration films as much as possible.SOLUTION: First openings 59a and second openings 59b are arranged in an array on a substrate. Vibration films 31 and 36 are formed corresponding to each of the first openings 59a and second openings 59b. Vibration films 31 and 36 closes each of the first openings 59a and second openings 59b. A piezoelectric element is arranged on each of the vibration films 31 and 36. The first opening 59a has a first aspect ratio with a length W1 in a first direction DR1 and a length L1 in a second direction DR2 longer than the length W1, and the second opening 59b has a second aspect ratio smaller than the first aspect ratio with a length W2 in the first direction DR 1 the same as that of the first opening 59a.COPYRIGHT: (C)2015,JPO&INPIT【課題】できる限り振動膜の寸法誤差を回避することができる超音波デバイスは提供される。【解決手段】基板は第1開口部59aおよび第2開口部59bをアレイ状に配列する。第1開口部59aおよび第2開口部59bはそれぞれに対応して振動膜31、36が形成される。振動膜31、36は第1開口部59aおよび第2開口部59bをそれぞれ塞ぐ。振動膜31、36上には圧電素子が配置される。第1開口部59aは、第1方向DR1の長さW1よりも第2方向DR2に大きい長さL1を有する第1アスペクト比を有し、第2開口部59bは、第1方向DR1に第1開口部59aと同じ長さW2を有し第1アスペクト比よりも小さい第2アスペクト比を有する。【選択図】図5
