Koninklijke Philips N.V.;Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
发明人:
申请号：
EP18205877.6
公开号：
EP3654075A1
申请日:
2018.11.13
申请国别(地区):
EP
年份:
2020
代理人:
摘要：
The invention relates to a method of manufacturing a structured grating, a corresponding structured grating component (1) and an imaging system. The method comprising the steps of: providing (110, 120, 130) a catalyst (30) on a substrate (20), the catalyst (20) having a grating pattern； growing (140) nanostructures (50) on the catalyst (30) so as to form walls (52) and trenches (54) based on the grating pattern； and filling (160) the trenches (54) between the walls (52) of nanostructures (50) using an X-ray absorbing material (70). The invention provides an improved method for manufacturing a structured grating and such structured grating component (1), which is particularly suitable for dark-field X-ray imaging or phase-contrast imaging.
