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Methods for preparing isolated micro- and nanostructures using soft lithography or printing lithography
专利权人:
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL
发明人:
DeSIMONE, Joseph, M.,ROLLAND, Jason, P.,EXNER, Ansley, E.,SAMULSKI, Edward, T.,SAMULSKI, R., Jude,MAYNOR, Benjamin, W.,EULISS, Larken, E.,DENISON, Ginger, M.
申请号:
DK04821787
公开号:
DK1704585T3
申请日:
2004.12.20
申请国别(地区):
DK
年份:
2017
代理人:
摘要:
The presently disclosed subject matter describes the use of fluorinated elastomer-based materials, in particular perfluoropolyether (PFPE)-based materials, in high-resolution soft or imprint lithographic applications, such as micro- and nanoscale replica molding, and the first nano-contact molding of organic materials to generate high fidelity features using an elastomeric mold. Accordingly, the presently disclosed subject matter describes a method for producing free-standing, isolated nanostructures of any shape using soft or imprint lithography techniques.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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