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光インプリント用硬化性組成物、パターン形成方法、パターンおよび含フッ素化合物
专利权人:
富士フイルム株式会社
发明人:
北川 浩隆,後藤 雄一郎
申请号:
JP20140063488
公开号:
JP6139448(B2)
申请日:
2014.03.26
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
Provided are a curable composition for optical imprinting, which exhibits excellent mold release properties and ink jet discharge precision, a method for forming a pattern, a pattern, and a fluorine-containing compound. The curable composition for optical imprinting contains a polymerizable compound, a photopolymerization initiator and a fluorine-containing compound. The fluorine-containing compound is represented by general formula (I) or general formula (II). In general formulae (I) and (II), Rf1 to Rf3 are each independently a fluoroalkyl group having 1-9 carbon atoms and having 2 or more fluorine atoms; R is an alkyl group having 1-8 carbon atoms, an alkenyl group having 2-8 carbon atoms or an aryl group having 6-8 carbon atoms; l1 to l3 are each independently a number between 0 and 10, m is an integer between 2 and 4, and n1 and n2 are each independently a number between 1 and 25.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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