Leibniz-Institut für Photonische Technologien e.V.
发明人:
申请号：
EP18830746.6
公开号：
EP3723588A1
申请日:
2018.12.12
申请国别(地区):
EP
年份:
2020
代理人:
摘要：
An apparatus (100) for examining a sample (2), comprising an imaging device (1) for obtaining an overview image (21) of the sample (2), a measuring instrument (3) for locally querying at least one property (22) of the sample (2) using a laser beam (32) that emerges from an aperture (31), furthermore comprising tracking means (4) for ascertaining the location (23) on the sample (2) that is currently queried by the laser beam (32), and a memory (6), in which the property (22) queried by the laser beam (32) is associated with the ascertained location (23) on the sample (2), wherein the tracking means (4) are embodied to ascertain the location (23) at which the laser beam (32) strikes the sample (2) by evaluating the laser point (32a) arising from the overview image (21) in the process and/or to ascertain said location (23) by measuring the position (31a) and orientation (31b) of the aperture (31).
