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感光性樹脂組成物
专利权人:
旭化成株式会社
发明人:
落合 真彦
申请号:
JP20120188990
公开号:
JP6113976(B2)
申请日:
2012.08.29
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a photosensitive resin composition showing an excellent space width of a positive pattern and excellent tenting property.SOLUTION: The photosensitive resin composition comprises (a) an alkali-soluble polymer having a repeating unit derived from a copolymer component expressed by general formula (I) by 30 mass% or more with respect to the whole weight; (b) an addition polymerizable monomer having an average molecular weight of 1,100 or more; and (c) a photopolymerization initiator. In formula (I), Rrepresents a hydrogen atom or a methyl group; and Ris selected from the group consisting of a hydrogen atom, halogen atom, hydroxyl group, alkyl group having 1 to 12 carbon atoms, alkoxy group having 1 to 12 carbon atoms and haloalkyl group.
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