PROBLEM TO BE SOLVED: To provide: a method for manufacturing an ultrasonic device, which enables the increase in resolution of an image produced based on ultrasonic waves by reducing the variation in thickness of an acoustic matching layer a method for manufacturing an ultrasonic probe a method for manufacturing electronic equipment and a method for manufacturing an ultrasonic imaging device.SOLUTION: A method for manufacturing an ultrasonic device comprises the steps of: forming, on a vibration plate 50 of a substrate 11, a piezoelectric element 17 including a first electrode 14, a piezoelectric material layer 15 and a second electrode 16 forming an opening 18 at a position on the substrate 11 opposed to the piezoelectric element 17 providing an acoustic matching layer 30 for transmitting ultrasonic waves generated by driving the piezoelectric element 17 and a lens member 31 for refracting ultrasonic waves on the side of any one of the face of the substrate 11 where the piezoelectric material layer 15 is provided, and the face where the opening 18 is provided, thereby making the ultrasonic device. In the method, a wall part is provided on the side of the any one face of the substrate 11 around the substrate and then, a fluid material is charged inside the wall part to cure the fluid material, thereby making the acoustic matching layer 30 having a flat surface and then the acoustic matching layer 30 is bonded with the lens member 31.SELECTED DRAWING: Figure 7COPYRIGHT: (C)2018,JPO&INPIT【課題】音響整合層の厚さのばらつきを低減して、超音波に基づいて生成される画像の分解能を向上させることが可能な超音波デバイスの製造方法、超音波プローブの製造方法、電子機器の製造方法及び超音波画像装置の製造方法を提供する。【解決手段】基板11の振動板50上に第1電極14、圧電体層15及び第2電極16を含む圧電素子17を形成し、基板11の圧電素子17と対向する位置に開口部18を形成し、基板11の圧電体層15を設けた面及び開口部18を設けた面の何れかの面側に、圧電素子17の駆動によって発生する超音波を伝播させる音響整合層30及び超音波を屈折させるレンズ部材31を設けて超音波デバイスとする超音波デバイスの製造方法であって、基板11の何れかの面側の周囲に壁部を設けて壁部内に流動材を注入し、流動材を硬化して表面が平坦の音響整合層30とし、音響整合層30とレンズ部材31とを接合する。【選択図】図7
