PLASMA GENERATING APPARATUS, AND CLEANING/PURIFYING APPARATUS USING SAME
- 专利权人:
- 发明人:
- 申请号：
- EP12815572.8
- 公开号：
- EP2733121A1
- 申请日:
- 2012.06.06
- 申请国别(地区):
- EP
- 年份:
- 2014
- 代理人:
- 摘要：
- A cleaning and purifying apparatus 40 detects an abnormal event that occurs during use of the plasma generator 1 and controls plasma discharge based on the result of detection.
- 来源网站：
- 中国工程科技知识中心
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