NG, ELDWIN,恩 艾尔德温,恩 艾爾德溫,TSAI, JULIUS MING LIN,蔡明霖,APTE, NIKHIL,亚普提 尼奇尔,亞普提 尼奇爾,恩 艾尔德温,恩 艾爾德溫,亚普提 尼奇尔,亞普提 尼奇爾
申请号：
TW106113266
公开号：
TW201804958A
申请日:
2017.04.20
申请国别(地区):
TW
年份:
2018
代理人:
摘要：
A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. An interior support structure is disposed within the cavity and connected to the substrate and the membrane.所提供的是一種壓電微機械超音波換能器(PMUT)裝置。該PMUT包括基材、以及連接至該基材之邊緣支撐結構。隔膜乃連接至該邊緣支撐結構，使得該隔膜與該基材之間界定空腔，其中，該隔膜經組配而容許在超音波頻率下移動。該隔膜包括壓電層、以及耦合至該壓電層之對置側的第一與第二電極。內部支撐結構乃設置於該空腔內並且連接至該基材及該隔膜。
