PROBLEM TO BE SOLVED: To provide a VCSEL that reduces an increase in laser threshold and stabilizes output.SOLUTION: A surface light emitting laser comprises: a p-type first semiconductor layer 105 that is arranged on an active layer 104 a second semiconductor layer 106 that is arranged on the first semiconductor layer 105 and includes an opening 130 and a p-type third semiconductor layer 107 that is arranged on the second semiconductor layer 106 and the first semiconductor layer 105 located in the opening 130 to fill a difference in step formed by the opening 130. The first semiconductor layer 105 includes hydrogen the first semiconductor layer 105 has a hydrogen density distribution in which the density of hydrogen of a portion corresponding to the opening 130 is lower than the density of hydrogen of a portion outside the portion corresponding to the opening 130.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2017,JPO&INPIT【課題】 レーザ閾値の増加を低減し、出力を安定にするVCSELを提供する。【解決手段】 活性層104の上に配置されたp型の第1の半導体層105と、第1の半導体層105の上に配置され、開口部130を有する第2の半導体層106と、第2の半導体層106の上と開口部130に位置する第1の半導体層105の上に、開口部130による段差を埋めるように配置されたp型の第3の半導体層107と、を有し、第1の半導体層105は、水素を有し、第1の半導体層105は、開口部130に対応する部分の水素濃度が開口部130に対応する部分の外の部分の水素濃度よりも低い水素濃度分布を有する。【選択図】 図1
