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導電性酸化物およびその製造方法ならびに酸化物半導体膜の製造方法
专利权人:
住友電気工業株式会社
发明人:
宮永 美紀,曽我部 浩一,粟田 英章,岡田 浩,吉村 雅司
申请号:
JP20160091156
公开号:
JP6137382(B2)
申请日:
2016.04.28
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
An electrically conductive oxide comprises In, Al, at least one element M selected from the group consisting of Zn and Mg and O, and also comprises crystalline Al2MO4. A method for producing an electrically conductive oxide comprises: a step of preparing a first mixture comprising an Al2O3 powder and an MO powder, wherein M represents at least one element selected from the group consisting of Zn and Mg (S10); a step of pre-sintering the first mixture to produce a crystalline Al2MO4 powder (S20); a step of preparing a second mixture comprising the crystalline Al2MO4 powder and an In2O3 powder (S30); a step of molding the second mixture to produce a molding (S40); and a step of sintering the molding (S50). Thus, provided are: an electrically conductive oxide which is inexpensive, can be used suitably for a sputtering target, and enables the production of an oxide semiconductor film having high physical properties; a method for producing the electrically conductive oxide; and an oxide semiconductor film.
来源网站:
中国工程科技知识中心
来源网址:
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