Vystavel Tomas,Botman Aurelien Philippe Jean Maclou
申请号：
US201614992743
公开号：
US10105734(B2)
申请日:
2016.01.11
申请国别(地区):
美国
年份:
2018
代理人:
Scheinberg & Associates, P.C. `Scheinberg Michael O.
摘要：
A method of modifying a sample surface layer in the vacuum chamber of a particle-optical apparatus, the method performed in vacuum, the method comprising:
