PROBLEM TO BE SOLVED: To provide an electrolytic cell which can efficiently make electrified water which has excellent ability for the surface cleaning and treatment to articles of semiconductors, glass or resins.SOLUTION: The electrolytic cell for making the electrified anode water suitable for the surface cleaning and surface treatment is installed together with a cathode chamber 41 and an anode chamber 50 and comprises firmly sticking a cathode electrode 44 on a side facing the cathode chamber 41 of a fluorine cation exchange membrane 45 disposed to divide these chambers, providing the opposite side with an intermediate chamber 48 filled with a cation exchange resin 46, contacting the cation exchange resin 46 with the fluorine cation exchange membrane, admitting raw water into the intermediate chamber 48 so as to pass the anode chamber 50 and recovering the water passed through the anode chamber 50 as the electrified anode water.COPYRIGHT: (C)2003,JPO【課題】半導体、ガラスまたは樹脂等の物品の表面洗浄能力、表面処理能力の性能を向上させる優れた能力を有する帯電水を効率よく生成することができる電解槽を提供する。【解決手段】カソード室41及びアノード室50を並設した電解槽であって、これらの室を区画するように設けたフッ素系カチオン交換膜45のカソード室41に臨む面にカソード電極44を密着させ、反対側面には、カチオン交換樹脂46を充填した中間室48を設けて該カチオン交換樹脂46をフッ素系カチオン交換膜に接触させ、原料水を中間室48に流入させアノード室50を通過させて、このアノード室50を通過した通過水を帯電アノード水として回収することを特徴とする表面洗浄・表面処理に適した帯電アノード水の製造用電解槽。
