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Tilted gratings and method for production of tilted gratings
专利权人:
Klaus Juergen Engel;Thomas Koehler;Ewald Roessl;Gereon Vogtmeier
发明人:
Gereon Vogtmeier,Klaus Juergen Engel,Thomas Koehler,Ewald Roessl
申请号:
US13319196
公开号:
US09348067B2
申请日:
2010.06.09
申请国别(地区):
US
年份:
2016
代理人:
摘要:
The present invention relates to phase-contrast imaging which visualizes the phase information of coherent radiation passing a scanned object. Focused gratings are used which reduce the creation of trapezoid profile in a projection with a particular angle to the optical axis. A laser supported method is used in combination with a dedicating etching process for creating such focused grating structures.
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