РИХТЕР Йорам (IL),ТАММАМ Эрик С. (IL),МАНДЭЛ Шахар Эвен-дар (IL)
申请号：
RU2014102901/14
公开号：
RU2014102901A
申请日:
2012.08.31
申请国别(地区):
RU
年份:
2015
代理人:
摘要：
1. A sensitive device for measuring fluid pressure, comprising: a vibration sensor containing a sensitive membrane that has a thickness of at least 1 μm, while the vibration sensor has a total volume of less than or equal to 0.3 mm. The device according to claim 1, further comprising a bonding layer that is firmly connected to the vibration sensor. The device according to claim 2, further comprising a fixing means that is firmly connected to the bonding layer. The device according to claim 1, wherein the sensitive membrane has a thickness of 2 μm. The device according to claim 1, further comprising: a housing covering a vibration sensor, wherein the housing does not cover the entire sensitive membrane； a support plate having an opening, wherein the thickness of the support plate is less than or equal to 150 microns. 6. The device according to claim 5, further comprising a lower film covering the sensitive membrane. The apparatus of claim 6, wherein the bottom film is substantially impervious. The device according to claim 6, in which the lower film is permeable. The device of claim 6, wherein the lower film is acoustically transparent. A sensitive device for measuring fluid pressure, comprising: a vibration sensor comprising a sensitive membrane having a thickness of at least 1 μm； a housing defining a cavity in which the vibration sensor is located； a support plate on which the housing is located, wherein the thickness of the support plate is less than one fifth of the total height of the device or equal to one fifth of the total height of the device. The device according to claim 9, further comprising a lower film that is placed1. Чувствительное устройство для измерения давления текучей среды, содержащее:вибрационный датчик, содержащий чувствительную мембрану, которая имеет толщину по меньшей мере 1 мкм, при этом вибрационный датчик имеет полный объем меньше или равный 0,3 мм.2. Устройство по п. 1, дополнительно содержащее связывающий слой, который прочно соединен
