To provide a fine processing filter device, a method of manufacturing the fine processing device and a usage of the fine processing filter device.SOLUTION: A fine processing device 100 can perform such diffusion that a transport resistance characteristic is improved between two fluids as compared to the conventional filter device. The device can include a composite structure which contains a porous membrane 115 superimposed on a substrate structure 105. The substrate structure can define a cavity 125 and a plurality of recessed parts 130 which are formed such that corrected convection current of first fluid can improve diffusion transport between the first fluid and second fluid which flow through a membrane.SELECTED DRAWING: Figure 1【課題】微細加工ろ過デバイス、微細加工デバイスを作る方法、及び微細加工ろ過デバイスの使用法の提供。【解決手段】本デバイス１００は、従来のろ過デバイスと比較して、２つの流体間で輸送抵抗特性が改善された拡散を行わせることができる。本デバイスは、支持体構造１０５の上に重なる多孔質膜１１５を含む複合構造を含むことができる。支持体構造は、修正された第１の流体の対流が、膜を通る第１の流体と第２の流体間の拡散輸送を改善することができるよう形成されたキャビティ１２５及び複数の凹部１３０を画成することができる。【選択図】図１
