An ampoule is disposed within a package, a metal tube is disposed between the package and a lid, one end of the metal tube protrudes to the outside, and a low melting point glass having a through-hole is disposed between the package and lid in order to connect the package and the lid each other. An end of the metal tube is connected to a pump which controls circulation of a cleaning solvent or coating agent. The pump circulates the cleaning solvent or the coating agent between the inside and the outside of the package. The gap between the package and the lid formed when the metal tube is extracted by and extracting melting the low melting point glass is sealed.
