洗浄装置
- 专利权人:
- 三浦工業株式会社
- 发明人:
- 藤井 慎二,山崎 崇文
- 申请号：
- JP2009196356
- 公开号：
- JP5370921B2
- 申请日:
- 2009.08.27
- 申请国别(地区):
- JP
- 年份:
- 2013
- 代理人:
- 摘要：
PROBLEM TO BE SOLVED: To solve at the same time such problems as: how to reduce the space required, how to reduce the amount of a cleaning liquid consumed, how to prevent generation of cavitation, and how to reduce clogging with fine particle foreign matter.
SOLUTION: In a cleaning apparatus including a cleaning vessel 3, a pressure reducing means 6 containing a heat exchanger 4 condensing gas in the cleaning vessel 3 and a vacuum pump 5, a pressure returning means 7 in the cleaning vessel 3, and a control means 14 for boiling the cleaning liquid in the cleaning vessel 3 by alternating pressure reduction and pressure return, the heat exchanger 4 is constituted by a plate-type heat exchanger for cooling gas with cooling water, and a gas-liquid separator 9 is installed upstream of the heat exchanger 4 to separate the cleaning liquid, fine liquid drops of the cleaning liquid and fine foreign matter contained in gas from the gas by a demister, and to return the separated liquid to the cleaning vessel 3.
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- 来源网站：
- 中国工程科技知识中心
