To provide a sterilization apparatus capable of performing sterilization with high efficiency by sterilizing gas while preventing condensation of the sterilizing gas.SOLUTION: A sterilization apparatus 1 comprises: a gas generation part 5 for generating HOgas a steam generation part 6 for generating steam a heating part 7 for raising the room temperature and a control part 8 which, while controlling the room temperature t so as to prevent the condensation of the HOgas and the steam, controls the gas generation part 5 so that a gas concentration c becomes a gas concentration setting value C and controls the steam generation part 6 so that a relative humidity rh becomes a relative humidity setting value RH.SELECTED DRAWING: Figure 1【課題】本発明の目的は、殺菌ガスの凝縮を防止しつつも、殺菌ガスによる効率の良い殺菌を行うことのできる殺菌装置を提供する。【解決手段】殺菌装置1は、H2O2ガスを発生させるガス発生部5と、水蒸気を発生させる水蒸気発生部6と、室温を上昇させる加熱部7と、H2O2ガス及び水蒸気が凝縮しないように室温tを制御しながら、ガス濃度cがガス濃度設定値Cとなるようにガス発生部5を制御し、相対湿度rhが相対湿度設定値RHとなるように水蒸気発生部6を制御する制御部8と、を備える。【選択図】図1
