Delivery devices, methods and systems are provided for the delivery of particles into a biological tissue. The device includes a gas source comprising a gas or capable of selectively producing a gas； a first particle source comprising a first plurality of particles； a first collimator fluidly connected with the gas source and adapted to form a collimated stream of the first plurality of particles entrained in the gas. The device also includes a tissue-interfacing surface adapted to interface with a surface of the tissue and orient the first collimator with the tissue such that the collimated stream of the first plurality of particles will penetrate the tissue in a direction substantially perpendicular to the surface of the tissue.
