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INSULATION OF MICRO STRUCTURES
专利权人:
Edvard Kalvesten;Anders Eriksson;Thorbjorn Ebefors
发明人:
Edvard Kalvesten,Thorbjorn Ebefors,Anders Eriksson
申请号:
US14367053
公开号:
US20140378804A1
申请日:
2012.11.29
申请国别(地区):
US
年份:
2014
代理人:
摘要:
A method of providing a metal coating on a substrate (10), and electrically insulating sections/parts of the metal coated substrate from each other. A substrate is provided with an insulating material in the substrate, the insulating first material extending through the thickness of the substrate and protruding above one surface of the substrate. It forms an enclosed section/portion (14) of the substrate. A protective structure (15) is provided on the insulating material such that it covers the entire circumference thereof. The insulating material is selectively etched to create an under-etch (18) under the protective structure. Finally conductive material (19) is deposited to provide a metal coating over the substrate, whereby the under-etch will provide a disruption in the deposited metal coating, thereby electrically insulating the enclosed section from the surrounding substrate.
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