An MEMS pressure sensing apparatus includes an MEMS pressure sensor, and first and second film sheets. The MEMS pressure sensor has a first space on a side of a pressure detection surface of a diaphragm, and has the diaphragm. The first film sheet is placed on and in contact with a part under measurement so as to support the MEMS pressure sensor, and has a second space communicating with the first space and having a size in a direction parallel to the pressure detection surface. The second film sheet has a third space with a size in a direction parallel to the pressure detection surface for positioning the MEMS pressure sensing apparatus on the part under measurement, and is placed such that an area of the part under measurement is located in the third space before the MEMS pressure sensing apparatus is placed on the part under measurement.
