PROBLEM TO BE SOLVED: To provide a detector capable of low-noise operation due to a further reduction in signal wire capacities and high-speed drive due to a further reduction in time constants of drive wires in a detector, especially a detector of laminate type, which is increasingly required of smaller pixel pitch and many more pixels.SOLUTION: The detector includes a conversion device 104 which converts radioactive ray or light into electrical charge and a switching element 105, as well as a plurality of pixels 102 arranged in row and column directions, a drive wire 107 connected to a plurality of switching elements in the row direction, and a signal wire 108 connected to a plurality of switching elements in the column direction, the conversion device 104 being disposed above the switching element 105. The signal wire 108 consists of a conductive layer 208 or 509 buried in an insulation member beneath the uppermost surface of the drive wire 107 which is disposed below the conversion device 104.COPYRIGHT: (C)2012,JPO&INPIT【課題】 更なる小画素ピッチ化及び多画素化が求められる検出装置、特に、積層型の検出装置において、信号線容量の更なる低減による低ノイズ化及び駆動線の時定数の更なる低減による高速駆動化が可能な検出装置を提供する。【解決手段】 放射線又は光を電荷に変換する変換素子104と、スイッチ素子105と、を含み、行方向及び列方向に配列された複数の画素102と、行方向の複数のスイッチ素子に接続された駆動線107と、列方向の複数のスイッチ素子に接続された信号線108と、を有し、変換素子104がスイッチ素子105の上方に配置された検出装置であって、信号線108は、変換素子104の下方に配置された駆動線107の最上位表面よりも下層の絶縁部材に埋め込んで配置された導電層208又は509からなる。【選択図】 図2
