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測定方法及び測定装置及びプログラム
专利权人:
富士フイルム株式会社
发明人:
胡 軼
申请号:
JP2015061517
公开号:
JP6283327B2
申请日:
2015.03.24
申请国别(地区):
JP
年份:
2018
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a measuring method which allows accurate non-destructive measurement of a quantity of water solution of an agent for each needle-like recess of a mold at a high speed, a measuring apparatus and a program.SOLUTION: A transmitted light image imaging transmitted light TL1, TL2, TL3 of parallel light PL emitted from a second surface 12b opposite to a first surface of the side where water solution of a mold is charged is acquired by a perpendicular incidence of the parallel light onto the first surface. A liquid level feature line indicating a boundary between a liquid level 18a of water solution of a needle-like recess and a second wall surface part 14b located closer to the side of the first surface than to the liquid level of the needle-like recess is detected for each needle-like recess 14 from an image pattern in the transmitted light image formed by the transmitted light of the parallel light entering each of a non-formation region of the needle-like recess, a first wall surface part 14a in the water solution of the needle-like recess and the second wall surface part, by analyzing the transmitted light image. The quantity for each needle-like recess is calculated on the basis of the detection result of the liquid level feature line and the known shape of the needle-like recess.SELECTED DRAWING: Figure 6
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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