PROBLEM TO BE SOLVED: To provide a novel sterilization method and a sterilization apparatus which can effectively carry out a sterilization treatment of an object to be treated.SOLUTION: The sterilization method includes: carrying out a humidifying step of humidifying until the humidity in a sterilization cabinet 2 exceeds 80%, and a dehumidifying step of dehumidifying the inside of the sterilization cabinet 2 by condensation of water vapor present in the sterilization cabinet 2 after completion of the humidifying step due to stoppage of humidification and during execution of the dehumidifying step, feeding ozone continuously or intermittently into the sterilization cabinet 2.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2017,JPO&INPIT【課題】 本発明は、被処理物を効果的に除菌処理し得る新規な除菌方法、及び除菌装置を提供することを目的とする。【解決手段】 除菌庫2内の湿度が80%を超えるまで加湿する加湿工程と、加湿の停止による前記加湿工程の終了後、前記除菌庫2内に存する水蒸気の凝縮によって前記除菌庫2内を減湿する減湿工程と、を実行し、前記減湿工程の実行中、前記除菌庫2内にオゾンを連続的、又は間欠的に供給する。【選択図】図1
