A micro gas driving apparatus is disclosed and comprises a gas inlet board, a resonance plate, a piezoelectric actuator and a gas gathering board. The gas inlet board, the resonance plate, the piezoelectric actuator and the gas gathering board are stacked in sequence, wherein a chamber gap is formed between the resonance plate and the piezoelectric actuator, and a first chamber is thereby formed. By accurately controlling the chamber gap, it can make sure enough space is kept in the first chamber so that when the piezoelectric actuator is actuated, the gas is guided into the first chamber from the gas inlet board and through the resonance plate, and then the gas is further transmitted, so that a pressure gradient flow path is formed and the gas is continuously pushed out, and the micro gas driving apparatus is able to be combined with a micro valve apparatus to form a micro fluid control apparatus. The valve apparatus comprises a valve plate and an outlet board, and the valve plate and the outlet board are stacked in sequence, when the gas is transmitted from the micro gas driving apparatus into the micro valve apparatus, a valve hole of the valve plate is opened or closed corresponding to the direction of the one-way-flow gas, and a pressure gathering operation or a pressure releasing operation is performed.一種微型輸送裝置，包括：堆疊設置之進氣板、共振片、壓電致動器及集氣板，其中共振片與壓電致動器之間具有腔室間距形成之第一腔室，精確控制腔室間距來確保第一腔室具有足夠的空間，使壓電致動器受驅動時，氣體由進氣板導入，經共振片進入第一腔室內，再繼續傳輸，以形成壓力梯度流道持續推出氣體；並與一微型閥門裝置組成一微型流體控制裝置。微型閥門裝置包括堆疊設置之閥門片以及出口板；當氣體自微型輸送裝置傳輸至微型閥門裝置內，因應氣體之單向流動而使閥門片之閥孔進行開或關，俾進行集壓或卸壓。
