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Device for providing a flow of plasma
专利权人:
LINDE AKTIENGESELLSCHAFT
发明人:
申请号:
GB201208298
公开号:
GB201208298D0
申请日:
2012.05.09
申请国别(地区):
GB
年份:
2012
代理人:
摘要:
A device for providing a flow of non-thermal gaseous plasma for treatment of a treatment region comprises a cell for the generation of the non-thermal plasma, the cell having an inlet for gas and an outlet for the non-thermal gaseous plasma. The cell is in heat conducting relationship with a heat sink through a heat pipe, the heat sink and the heat pipe both forming parts of the device. The cell typically has a dielectric member of high thermal conductivity in heat conducting relationship with the heat pipe. The heat sink is typically a capsule containing the gas to be supplied to the inlet of the cell.
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