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感光性樹脂組成物、硬化レリーフパターンの製造方法、半導体装置及び表示体装置
专利权人:
旭化成株式会社
发明人:
奥田 敏章,佐々木 隆弘
申请号:
JP20130033764
公开号:
JP6108869(B2)
申请日:
2013.02.22
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a photosensitive resin composition containing a phenolic resin, which shows excellent storage stability, can be cured at a lower temperature, and gives a cured film that suppresses pattern abnormality even when a wafer with a cured relief pattern is subjected to a reflow process, to provide a method for producing a cured relief pattern for forming a pattern by using the photosensitive resin composition, and to provide a semiconductor device and a display device having the cured relief pattern.SOLUTION: There is provided a positive photosensitive resin composition comprising: (A) 100 pts.mass of a phenolic resin; (B) 0.01 to 20 pts.mass of at least one nitrogen-containing compound selected from a group consisting of a tetrazole compound and a purine compound; and (C) 0.1 to 70 pts.mass of a compound having a quinonediazide group.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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