The invention relates to the sterilization of a load of goods with hydrogen peroxide vapor in a closed space. The method involves a sequence of creating a sub-atmosphelic pressure in a sterilization chamber, introduction of vaporized hydrogen peroxide and the use of a gas circulation device within the sterilization chamber, whereby the output of the gas circulation device is controlled according to the pressure in the sterilization chamber. A uniform and consistent distribution of hydrogen peroxide throughout the load is achieved.
