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ADAPTIVE OPTICS APPARATUS THAT CORRECTS ABERRATION OF EXAMINATION OBJECT AND IMAGE TAKING APPARATUS INCLUDING ADAPTIVE OPTICS APPARATUS
专利权人:
CANON KABUSHIKI KAISHA
发明人:
Kenichi Saito
申请号:
US13777908
公开号:
US20130169932A1
申请日:
2013.02.26
申请国别(地区):
US
年份:
2013
代理人:
摘要:
An adaptive optics apparatus includes a first light modulating unit configured to perform modulation in a polarization direction of one of two polarized light components in light emitted from a light source, a changing unit configured to rotate the light modulated by the first light modulating unit by 90 degrees, a second light modulating unit configured to modulate the light changed by the changing unit in the polarization direction, and an irradiating unit configured to irradiate a measurement object with the light modulated by the second light modulating unit.
来源网站:
中国工程科技知识中心
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http://www.ckcest.cn/home/

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