A method for constructing a three-dimensional image of a sample includes producing electromagnetic radiation and directing the produced electromagnetic radiation such that it is incident on the sample at an oblique angle. The incident electromagnetic radiation is scanned in discrete increments to a plurality of discrete locations along a first direction, and at each discrete location, scanned along a second direction orthogonal to the first direction. The sample reflects a first portion of the incident electromagnetic radiation and absorbs a second portion of the incident electromagnetic radiation, and emits electromagnetic radiation responsive to the absorption. A plurality of cross-sectional images is produced from the reflected electromagnetic radiation and the emitted electromagnetic radiation, and each cross-sectional image is modified to compensate for the oblique angle. The modified cross-sectional images are then combined to create a three-dimensional image of the sample.
